русский term (edited): ����� (�����)

Микроскописты говорят обычно coated with carbon или даже with coal.
Вот примеры:

... samples must be electrically conductive. Nonconductive materials can be evaporatively coated with carbon or gold to obtain conductivity without affecting observed surface morphology.
http://www.mee-inc.com/sem.html

... Scanning Electron Microscopy Imaging. ... The final polished specimen is coated with carbon to provide a conductive surface for viewing in the SEM. ...
ciks.cbt.nist.gov/~bentz/vdzconf/node4.html

Electron microscopy. TEM samples were lightly coated with carbon and examined in a 200 kV Philips CM200UT ...
www.sciencemag.org/cgi/data/303/5664/1656/DC1/1

the build-up of electrical charge, the thin sections were coated with carbon. ...
www.minsocam.org/MSA/AmMin/TOC/Abstracts/ 1999_Abstracts/JA99_Abstracts/Gotze_p1027_99.pdf

Washer-mounted specimens were ion-milled, lightly coated with carbon, and examined ...
www.minsocam.org/MSA/AmMin/TOC/ Articles_Free/1999/Ahn_p1967-1970_99.pdf

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Про установки для напыления можно прочесть хотя бы здесь:
The use of carbon films on TEM specimen grids or as carbon coatings is common in electron microscopy. These films add little to the background signal and they have relatively good electrical conductivity. Thin films (5 nanometres) are used in TEM to stabilise some specimens. Thicker films (up to 30 nanometres) may be used for TEM support films and in SEM for X-Ray microanalysis.
http://www.proscitech.com.au/catalogue/get_frames.htm?k2.asp